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Structure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substrate
\\v{C}eh, Miran, Chen, Hsing-Chao, Chen, Miin-Jang, Yang, Jer-Ren, Shiojiri, MakotoVolume:
51
Year:
2010
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.mc200902
File:
PDF, 4.00 MB
english, 2010