Mechanical behavior of ultrathin sputter deposited porous...

Acta Materialia 2017 / 02 Vol. 125

Mechanical behavior of ultrathin sputter deposited porous amorphous Al2O3 films

van der Rest, Astrid, Idrissi, Hosni, Henry, Frédéric, Favache, Audrey, Schryvers, Dominique, Proost, Joris, Raskin, Jean-Pierre, Van Overmeere, Quentin, Pardoen, Thomas
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Volume:
125
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2016.11.037
Date:
February, 2017
File:
PDF, 2.49 MB
english, 2017
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