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Fabrication of a resist pattern based on plasma–polystyrene interactions
Li, Ning, Feng, Lei, Teng, Fei, Wang, Yandong, Wu, Feifei, Yang, Xiangchao, Lu, NanVolume:
6
Year:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/c5ra24879e
File:
PDF, 458 KB
english, 2016