Hybrid chemical etching of femtosecond irradiated 3D structures in fused silica glass
Turco, Sara Lo, Osellame, Roberto, Ramponi, Roberta, Vishnubhatla, Krishna Chaitanya, Bellouard, Y., Canioni, L.Volume:
8
Year:
2013
Language:
english
Journal:
MATEC Web of Conferences
DOI:
10.1051/matecconf/20130805009
File:
PDF, 750 KB
english, 2013