E-beam Evaporated Polysilicon for Lead Zirconate...

IEEE Electron Device Letters 2016 / 10 Vol. 37; Iss. 10

E-beam Evaporated Polysilicon for Lead Zirconate Titanate-Based Micro-Actuators

Chen, Ssu-Han, Michael, Aron, Kwok, Chee Yee
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Volume:
37
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2016.2600639
Date:
October, 2016
File:
PDF, 1.33 MB
english, 2016
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