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Developments in understanding the nucleation of AlN on silicon by MOCVD and its effects on defects
Charles, Matthew, Bavard, Alexis, Bouis, Renan, Baines, Yannick, Escoffier, RenéVolume:
214
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201600431
Date:
April, 2017
File:
PDF, 727 KB
english, 2017