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Compositional analysis of silicon oxide/silicon nitride thin films
Meziani, Samir, Moussi, Abderrahmane, Mahiou, Linda, Outemzabet, RatibaVolume:
34
Language:
english
Journal:
Materials Science-Poland
DOI:
10.1515/msp-2016-0057
Date:
January, 2016
File:
PDF, 559 KB
english, 2016