Highly Accurate Real Space Nanometrology Using Revolving...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Highly Accurate Real Space Nanometrology Using Revolving Scanning Transmission Electron Microscopy

Dycus, J. H., Harris, J. S., Sang, X., Fancher, C. M., Findlay, S. D., Oni, A. A., Chan, T. E., Koch, C. C., Jones, J. L., Allen, L. J., Irving, D. L., LeBeau, J. M.
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615012003
Date:
August, 2015
File:
PDF, 6.36 MB
english, 2015
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