Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon
Kong, Lingyu, Dasgupta, Binayak, Ren, Yi, Mohseni, Parsian K., Hong, Minghui, Li, Xiuling, Chim, Wai Kin, Chiam, Sing YangVolume:
6
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep36582
Date:
December, 2016
File:
PDF, 1.57 MB
english, 2016