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Current Status of the Quality of 4H-SiC Substrates and Epilayers for Power Device Applications
Dudley, M., Wang, H., Guo, Jianqiu, Yang, Yu, Raghothamachar, Balaji, Zhang, J., Thomas, B., Chung, G., Sanchez, E. K., Hansen, D., Mueller, S. G.Volume:
1
Year:
2016
Language:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2016.63
File:
PDF, 627 KB
english, 2016