Direct Growth and Controlled Coalescence of Thick AlN...

Scientific Reports 2015 / 10 Vol. 5

Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate

Tran, Binh Tinh, Hirayama, Hideki, Maeda, Noritoshi, Jo, Masafumi, Toyoda, Shiro, Kamata, Norihiko
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Volume:
5
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep14734
Date:
October, 2015
File:
PDF, 899 KB
english, 2015
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