Simulation of Dual-Electrode Capacitively Coupled Plasma Discharges
Lu, Yijia, Ji, Linhong, Cheng, JiaVolume:
18
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/18/12/06
Date:
December, 2016
File:
PDF, 4.65 MB
english, 2016