Effects of Deposition Temperature and Film Thickness on the Structural, Electrical, and Optical Properties of Germanium Thin Films
Jordan, William B., Wagner, SigurdVolume:
715
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-715-A18.2
File:
PDF, 100 KB
english, 2002