Optimized plasma-polymerized fluoropolymer mask for local...

Journal of Applied Physics 2016 / 06 Vol. 119; Iss. 21

Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation

Lu, Bin, Defforge, Thomas, Fodor, Bálint, Morillon, Benjamin, Alquier, Daniel, Gautier, Gaël
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4953088
Date:
June, 2016
File:
PDF, 987 KB
english, 2016
Conversion to is in progress
Conversion to is failed