Piezoelectric Bulk Mode Disk Resonator Post-Processed for...

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

Piezoelectric Bulk Mode Disk Resonator Post-Processed for Enhanced Quality Factor Performance

Elsayed, Mohannad Y., Nabki, Frederic
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2633385
Date:
February, 2017
File:
PDF, 2.80 MB
english, 2017
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