High Accuracy Resonant Pressure Sensor With Balanced-Mass DETF Resonator and Twinborn Diaphragms
Du, Xiaohui, Wang, Liying, Li, Anlin, Wang, Lingyun, Sun, DaohengVolume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2632108
Date:
February, 2017
File:
PDF, 2.66 MB
english, 2017