Temperature dependent Cs retention, distribution, and ion...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 05 Vol. 34; Iss. 3

Temperature dependent Cs retention, distribution, and ion yield changes during Cs + bombardment SIMS

Giordani, Andrew, Lee, Hang Dong, Xu, Can, Gustafsson, Torgny, Hunter, Jerry L.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943159
Date:
May, 2016
File:
PDF, 1.07 MB
english, 2016
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