Plasma enhanced atomic layer deposition of ZnO with diethyl...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 09 Vol. 34; Iss. 5

Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition

Muneshwar, Triratna, Shoute, Gem, Barlage, Doug, Cadien, Ken
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4961885
Date:
September, 2016
File:
PDF, 1.03 MB
english, 2016
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