Masks and metallic electrodes compounds for silicon...

Masks and metallic electrodes compounds for silicon biosensor integration

Ravariu, Cristian, Manea, Elena, Babarada, Florin
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Volume:
697
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2016.12.099
Date:
March, 2017
File:
PDF, 2.56 MB
english, 2017
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