Manufacturing and characterization of a ceramic single-use microvalve
Khaji, Z, Klintberg, L, Thornell, GVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095002
Date:
September, 2016
File:
PDF, 1.72 MB
english, 2016