[IEEE 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Sendai, Japan (2016.8.22-2016.8.25)] 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Micro thermal sensor for nanometric surface defect inspection
Shimizu, Yuki, Matsuno, Yuki, Ohba, Yuta, Gao, WeiYear:
2016
Language:
english
DOI:
10.1109/nano.2016.7751308
File:
PDF, 318 KB
english, 2016