Periodic oxidation for fabricating titanium oxynitride thin...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 01 Vol. 34; Iss. 1

Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition

Iwashita, Shinya, Aoyama, Shintaro, Nasu, Masayuki, Shimomura, Kouji, Noro, Naotaka, Hasegawa, Toshio, Akasaka, Yasushi, Miyashita, Kohei
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4938106
Date:
January, 2016
File:
PDF, 1.63 MB
english, 2016
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