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AIP Conference Proceedings [American Institute of Physics 5TH NATIONAL CONFERENCE ON THERMOPHYSICAL PROPERTIES: (NCTP‐09) - Baroda (India) (7–9 October 2009)] - Comparative study of characteristics of polysilicon pressure sensor with different diaphragm sizes and piezoresistor configurations
Kumar, S. Santosh, Ojha, Anuj K., Kumar, Manish, Pant, B. D.Volume:
1249
Year:
2010
Language:
english
DOI:
10.1063/1.4945214
File:
PDF, 658 KB
english, 2010