Fabrication of nanostructured transmissive optical devices...

Nanotechnology 2016 / 12 Vol. 27; Iss. 48

Fabrication of nanostructured transmissive optical devices on ITO-glass with UV1116 photoresist using high-energy electron beam lithography

Williams, Calum, Bartholomew, Richard, Rughoobur, Girish, Gordon, George S D, Flewitt, Andrew J, Wilkinson, Timothy D
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/48/485301
Date:
December, 2016
File:
PDF, 3.82 MB
english, 2016
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