Comparison of SIMS and RBS for depth profiling of silica...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 05 Vol. 34; Iss. 3

Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions

Lorinčík, Jan, Veselá, Daniela, Vytykáčová, Soňa, Švecová, Blanka, Nekvindová, Pavla, Macková, Anna, Mikšová, Romana, Malinský, Petr, Böttger, Roman
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4944525
Date:
May, 2016
File:
PDF, 1022 KB
english, 2016
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