Ultraviolet photodetector based on Mg x Zn 1-x O films using plasma-enhanced atomic layer deposition
Lin, Yu-Chang, Lee, Hsin-Ying, Lee, Ching-TingVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4938074
Date:
January, 2016
File:
PDF, 910 KB
english, 2016