Elevated temperature performance of Si-implanted...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 07 Vol. 34; Iss. 4

Elevated temperature performance of Si-implanted solar-blind β-Ga 2 O 3 photodetectors

Ahn, Shihyun, Ren, Fan, Oh, Sooyeoun, Jung, Younghun, Kim, Jihyun, Mastro, Michael A., Hite, Jennifer K., Eddy, Charles R., Pearton, S. J.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4948361
Date:
July, 2016
File:
PDF, 490 KB
english, 2016
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