Structure and stoichiometry evolution of sputtered Nb doped...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 09 Vol. 34; Iss. 5

Structure and stoichiometry evolution of sputtered Nb doped TiO 2 films induced by O 2 pressure variation during postannealing process

Zhang, Letao, Xiao, Xiang, Zhou, Xiaoliang, He, Hongyu, Xu, Xin, Lin, Qingping, Zhou, Hang, Zhang, Shengdong, Zhang, Hongyuan, Liu, Qiong
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4961538
Date:
September, 2016
File:
PDF, 3.05 MB
english, 2016
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