Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Lithography via electrospun fibers with quantitative morphology analysis
Beisel, Joshua D., Murphy, John P., Andriolo, Jessica M., Kooistra-Manning, Emily A., Nicolaysen, Sean, Boese, Orrin, Fleming, Jake, Nakagawa, Wataru, Skinner, Jack L.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4964636
Date:
November, 2016
File:
PDF, 4.79 MB
english, 2016