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Curvature determination of embedded silicon chips by in situ rocking curve X-ray diffraction measurements at elevated temperatures
Angerer, Paul, Schöngrundner, Ronald, Macurova, Katerina, Wiessner, Manfred, Keckes, JozefVolume:
31
Language:
english
Journal:
Powder Diffraction
DOI:
10.1017/s0885715616000488
Date:
December, 2016
File:
PDF, 440 KB
english, 2016