Defects in SiC substrates and epitaxial layers affecting...

The European Physical Journal Applied Physics 2004 / 07 Vol. 27; Iss. 1-3

Defects in SiC substrates and epitaxial layers affecting semiconductor device performance

Müller, St. G., Sumakeris, J. J., Brady, M. F., Glass, R. C., Hobgood, H. McD., Jenny, J. R., Leonard, R., Malta, D. P., Paisley, M. J., Powell, A. R., Tsvetkov, V. F., Allen, S. T., Das, M. K., Palmo
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Volume:
27
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2004085
Date:
July, 2004
File:
PDF, 556 KB
english, 2004
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