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Defects in SiC substrates and epitaxial layers affecting semiconductor device performance
Müller, St. G., Sumakeris, J. J., Brady, M. F., Glass, R. C., Hobgood, H. McD., Jenny, J. R., Leonard, R., Malta, D. P., Paisley, M. J., Powell, A. R., Tsvetkov, V. F., Allen, S. T., Das, M. K., PalmoVolume:
27
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2004085
Date:
July, 2004
File:
PDF, 556 KB
english, 2004