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Building a spring-transport package for spinning rotor gauges
Fedchak, James A., Scherschligt, Julia, Sefa, Makfir, Phandinh, NicholasVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4916593
Date:
May, 2015
File:
PDF, 1.90 MB
english, 2015