Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 07 Vol. 34; Iss. 4
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Effect of vacuum thermal annealing to encapsulated graphene field effect transistors
Alexandrou, Konstantinos, Farmakis, Filippos, Arapis, Alexandros, Georgoulas, Nikolaos, Hao, Yufeng, Hone, James, Kymissis, IoannisVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4952409
Date:
July, 2016
File:
PDF, 811 KB
english, 2016