Spatial atomic layer deposition of ZnO/TiO 2...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 09 Vol. 34; Iss. 5

Spatial atomic layer deposition of ZnO/TiO 2 nanolaminates

Chen, Rong, Lin, Ji-Long, He, Wen-Jie, Duan, Chen-Long, Peng, Qi, Wang, Xiao-Lei, Shan, Bin
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4955289
Date:
September, 2016
File:
PDF, 1.54 MB
english, 2016
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