Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary
Yanagitani, Takahiko, Suzuki, MasashiVolume:
105
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4896262
Date:
September, 2014
File:
PDF, 365 KB
english, 2014