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Electromechanical coupling and gigahertz elastic properties...

Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary

Yanagitani, Takahiko, Suzuki, Masashi
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Volume:
105
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4896262
Date:
September, 2014
File:
PDF, 365 KB
english, 2014
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