High-precision method of measuring linear dimensions in a...

High-precision method of measuring linear dimensions in a raster electron microscope

R. M. Ammosov, A. I. Kozlitin, A. V. Nikitin
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Volume:
37
Language:
english
Pages:
5
DOI:
10.1007/bf00978312
Date:
June, 1994
File:
PDF, 417 KB
english, 1994
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