Selective deposition of Ta 2 O...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 01 Vol. 35; Iss. 1

Selective deposition of Ta 2 O 5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Vallat, Rémi, Gassilloud, Rémy, Eychenne, Brice, Vallée, Christophe
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4965966
Date:
January, 2017
File:
PDF, 1.19 MB
english, 2017
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