Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas
Xue, Chan, Wen, De-Qi, Liu, Wei, Zhang, Yu-Ru, Gao, Fei, Wang, You-NianVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4967913
Date:
March, 2017
File:
PDF, 1.49 MB
english, 2017