Evolution of microstructure and macrostress in sputtered...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

Evolution of microstructure and macrostress in sputtered hard Ti(Al,V)N films with increasing energy delivered during their growth by bombarding ions

Musil, Jindřich, Jaroš, Martin, Čerstvý, Radomír, Haviar, Stanislav
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4967935
Date:
March, 2017
File:
PDF, 1.03 MB
english, 2017
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