Inductively coupled BCl3/Cl2/Ar plasma etching of Al-rich...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

Inductively coupled BCl3/Cl2/Ar plasma etching of Al-rich AlGaN

Douglas, Erica A., Sanchez, Carlos A., Kaplar, Robert J., Allerman, Andrew A., Baca, Albert G.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4971245
Date:
March, 2017
File:
PDF, 648 KB
english, 2017
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