Effect of Temperature on Tribological, Electrochemical, and...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 9

Effect of Temperature on Tribological, Electrochemical, and Surface Properties during Copper CMP

Mudhivarthi, Subrahmanya, Zantye, Parshuram B., Kumar, Arun, Kumar, Ashok, Beerbom, Martin, Schlaf, Rudy
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1993347
File:
PDF, 226 KB
english, 2005
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