[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Detailed Correlation of Electrical and Breakdown Characteristics to the Structural Properties of ALD Grown HfO
Schroeder, Uwe, Weinreich, Wenke, Erben, Elke, Mueller, Johannes, Wilde, Lutz, Heitmann, Johannes, Agaiby, Rimoon, Zhou, Dayu, Jegert, Gunter, Kersch, AlfredYear:
2009
Language:
english
DOI:
10.1149/1.3205070
File:
PDF, 716 KB
english, 2009