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The Dynamic Characteristics Research of MEMS V-Shaped SiO2/Al Electrothermal Actuator
Shen, Yue Yue, Song, Rong Chang, Tang, Hai Mi, Chen, Qing Sen, Guan, PingVolume:
645-646
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.645-646.963
Date:
May, 2015
File:
PDF, 377 KB
english, 2015