Controlling the intrinsic bending of hetero-epitaxial silicon carbide micro-cantilevers
Ranjbar Kermany, Atieh, Iacopi, FrancescaVolume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4934188
Date:
October, 2015
File:
PDF, 727 KB
english, 2015