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Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology
Ziouche, Katir, Yuan, Zheng, Lejeune, Pascale, Lasri, Tuami, Leclercq, Didier, Bougrioua, ZahiaVolume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2633442
Date:
February, 2017
File:
PDF, 971 KB
english, 2017