Ag films grown by remote plasma enhanced atomic layer...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 01 Vol. 34; Iss. 1

Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

Amusan, Akinwumi A., Kalkofen, Bodo, Gargouri, Hassan, Wandel, Klaus, Pinnow, Cay, Lisker, Marco, Burte, Edmund P.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4936221
Date:
January, 2016
File:
PDF, 2.63 MB
english, 2016
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