Growth per cycle of alumina atomic layer deposition on nano- and micro-powders
Manandhar, Kedar, Wollmershauser, James A., Boercker, Janice E., Feigelson, Boris N.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4941918
Date:
March, 2016
File:
PDF, 2.29 MB
english, 2016