Design and fabrication of a SAW device with Ta filled...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 03 Vol. 33; Iss. 2

Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer

Richardson, Mandek, Cheemalapati, Surya, Everly, Richard, Sankaranarayanan, Subramanian K. R. S., Pyayt, Anna, Bhethanabotla, Venkat R.
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4906515
Date:
March, 2015
File:
PDF, 1.35 MB
english, 2015
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