Effect of substrate composition on atomic layer deposition using self-assembled monolayers as blocking layers
Zhang, Wenyu, Engstrom, James R.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4931722
Date:
January, 2016
File:
PDF, 2.18 MB
english, 2016