Thick sputtered tantalum coatings for high-temperature...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 11 Vol. 33; Iss. 6

Thick sputtered tantalum coatings for high-temperature energy conversion applications

Stelmakh, Veronika, Peykov, Daniel, Chan, Walker R., Senkevich, Jay J., Joannopoulos, John D., Soljačić, Marin, Celanovic, Ivan, Castillo, Robert, Coulter, Kent, Wei, Ronghua
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935156
Date:
November, 2015
File:
PDF, 672 KB
english, 2015
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